| OTFC-1800 | |
|---|---|
| Model | OTFC-1800CBI/DBI |
| Vacuum Chamber | SUS304, φ1800mm × 1920mm (H) |
| Substrate Dome Size | φ1600mm |
| Substrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor · Wavelength range: 350nm to 1100nm · Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 23 cm RF ion source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps *Option: Turbomolecular pump selectable |
| Performace | |
| Ultimate Pressure | 7.0 × 10-5Pa or lower |
| Pump Down Rate | 20 min (Atm. to 1.3 × 10-3Pa) |
| Substrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5700mm (W) × 7700mm (D) × 4000mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 150kVA approx. |
| Cooling Water Flow Rate | 180 /min or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 11200kg approx |
| OTFC-1550 | |
|---|---|
| Model | OTFC-1550CBI/DBI |
| Vacuum Chamber | SUS304, φ1550mm × 1800mm (H) |
| Substrate Dome Size | φ1400mm |
| Substrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor · Wavelength range: 350nm to 1100nm · Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 17cm RF Ion Source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap *Option: Turbomolecular pump selectable |
| Performace | |
| Ultimate Pressure | 7.0 × 10-5Pa or lower |
| Pump Down Rate | 15 minutes (Atm. to 1.3 × 10-3Pa) |
| Substrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5500mm (W) × 7200mm (D) × 3700mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 120kVA approx. |
| Cooling Water Flow Rate | 180 /min or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 10000kg approx |
| OTFC-1300 | |
|---|---|
| Model | OTFC-1300CBI/DBI |
| Vacuum Chamber | SUS304, φ1300mm × 1610mm (H) |
| Substrate Dome Size | φ1130mm |
| Substrate Dome Rotation Speed | 10 rpm to 50 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor · Wavelength range: 350nm to 1100nm · Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 17cm RF Ion Source |
| Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap *Option: Turbomolecular pump selectable |
| Performace | |
| Ultimate Pressure | 7.0 × 10-5Pa or lower |
| Pump Down Rate | 15 min (Atm. to 1.3 × 10-3Pa) |
| Substrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 5000mm (W) × 6500mm (D) × 3500mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 100kVA approx. |
| Cooling Water Flow Rate | 140 /min or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 8500kg approx. |
| OTFC-900 | |
|---|---|
| Model | OTFC-900CBI/DBI |
| Vacuum Chamber | SUS304, φ900mm × 1300mm (H) |
| Substrate Dome Size | φ790mm |
| Substrate Dome Rotation Speed | 10 rpm to 30 rpm (Variable) |
| Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor · Wavelength range: 350nm to 1100nm · Reflection/Transmittance |
| Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
| Evaporation Source | EB source: 2 units |
| Ion Source | 10cm RF Ion Source |
| Vacuum System | Roughing Pump, Diffusion Pump + Polycold Or Cryo Pump + Cryo Trap |
| Performace | |
| Ultimate Pressure | 7.0 × 10-5Pa or lower |
| Pump Down Rate | 15 min (Atm. to 1.3 × 10-3Pa) |
| Substrate Heater | 350℃ (max.) |
| Utility | |
| Layout Dimensions | 4500mm (W) × 5500mm (D) × 3200mm (H) approx. |
| Power Requirements | 3-phase, 200V, 50/60Hz, 80kVA approx. |
| Cooling Water Flow Rate | 80 /min or greater |
| Compressed Air Pressure | 0.5MPa or greater |
| Gross Weight | 5400kg approx. |
